Automatic speed control system for the chemical etching of thin films

The possibility of creating automatic control systems based on the interferometric optical method for chemical etching processes has been shown. A structural diagram of device for automatic control of the construction of an optical path from the elements of modern information fiber-optic systems has...

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Bibliographic Details

Published in:	Fìzika ì hìmìâ tverdogo tìla (Online) Vol. 26; no. 1; pp. 91 - 99
Main Authors:	Dalekorej, A.V., Ivanytsky, V.P., Kryuchyn, A.A., Legeta, Ya.P., Petrov, V.V., Rubish, V.M., Ryaboshchuk, M.M., Chychura, I.I.
Format:	Journal Article
Language:	English
Published:	Vasyl Stefanyk Precarpathian National University 01.01.2025
Subjects:	automatic control system automation of chemical etching processes etching process control algorithm interference thickness control methods
ISSN:	1729-4428, 2309-8589
Online Access:	Get full text
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