Automatic speed control system for the chemical etching of thin films

The possibility of creating automatic control systems based on the interferometric optical method for chemical etching processes has been shown. A structural diagram of device for automatic control of the construction of an optical path from the elements of modern information fiber-optic systems has...

Celý popis

Podrobná bibliografia

Vydané v:	Fìzika ì hìmìâ tverdogo tìla (Online) Ročník 26; číslo 1; s. 91 - 99
Hlavní autori:	Dalekorej, A.V., Ivanytsky, V.P., Kryuchyn, A.A., Legeta, Ya.P., Petrov, V.V., Rubish, V.M., Ryaboshchuk, M.M., Chychura, I.I.
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	Vasyl Stefanyk Precarpathian National University 01.01.2025
Predmet:	automatic control system automation of chemical etching processes etching process control algorithm interference thickness control methods
ISSN:	1729-4428, 2309-8589
On-line prístup:	Získať plný text
Tagy:	Pridať tag Žiadne tagy, Buďte prvý, kto otaguje tento záznam!