CMOS-Based High-Density Silicon Microprobe Arrays for Electronic Depth Control in Intracortical Neural Recording-Characterization and Application

This paper reports on the characterization and intracortical recording performance of high-density complementary-metal-oxide-semiconductor (CMOS)-based silicon microprobe arrays. They comprise multiplexing units integrated on the probe shafts being part of the signal transmission path. Their electri...

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Bibliographic Details
Published in:	Journal of microelectromechanical systems Vol. 21; no. 6; pp. 1426 - 1435
Main Authors:	Seidl, K., Schwaerzle, M., Ulbert, I., Neves, H. P., Paul, O., Ruther, P.
Format:	Journal Article
Language:	English
Published:	New York, NY IEEE 01.12.2012 Institute of Electrical and Electronics Engineers
Subjects:	Applied sciences CMOS integrated circuits CMOS MEMS Complementary-metal-oxide-semiconductor (CMOS) circuitry Crosstalk electrode impedances electrode selection Electrodes Electronics Exact sciences and technology high-density electrode array Impedance Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Micro- and nanoelectromechanical devices (mems/nems) Micromechanical devices and systems neural recording Neurons noise Physics potential measurements Probes Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Shafts silicon microprobes Microprobe Multiplexing Energy consumption Crosstalk Central nervous system Data transmission electrode selection Shafts Platinum Complementary MOS technology Complementary-metal-oxide-semiconductor (CMOS) circuitry noise Silicon Microsensors Microelectromechanical device Microelectrodes potential measurements Signal-to-noise ratio CMOS MEMS high-density electrode array In vivo Electrical measurement neural recording silicon microprobes electrode impedances
ISSN:	1057-7157, 1941-0158
Online Access:	Get full text
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