A Digital Closed-Loop Control System for MEMS Resonant Pressure Sensors Based on a Quadrature Phase-Locked Loop

This article presents a quadrature phase-locked-loop (QPLL)-based digital system for closed-loop control of micro-electromechanical system (MEMS) resonant sensors. The system estimates the sensing signal of the resonator in the form of in-phase and quadrature-phase components by an optimization algo...

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Bibliographic Details
Published in:	IEEE sensors journal Vol. 24; no. 7; pp. 10355 - 10363
Main Authors:	Zhou, Mengyang, Xia, Wenliang, Lu, Yulan, Xie, Bo, Chen, Jian, Wang, Junbo, Chen, Deyong
Format:	Journal Article
Language:	English
Published:	New York IEEE 01.04.2024 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:	Algorithms Amplitudes Analog circuits Automatic control Automatic gain control Closed loop systems Closed loops Closed-loop system Control systems Excitation Feedback control Field programmable gate arrays field-programmable gate array (FPGA) Frequency stability Linear vibration Linearity micro-electromechanical system (MEMS) resonant sensor Microelectromechanical systems Micromechanical devices optimization algorithm Phase locked loops phase-locked loop (PLL) Pressure sensors Quadratures Resonant frequency Resonators Sensor phenomena and characterization Sensor systems Sensors Tracking
ISSN:	1530-437X, 1558-1748
Online Access:	Get full text
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