A Digital Closed-Loop Control System for MEMS Resonant Pressure Sensors Based on a Quadrature Phase-Locked Loop

This article presents a quadrature phase-locked-loop (QPLL)-based digital system for closed-loop control of micro-electromechanical system (MEMS) resonant sensors. The system estimates the sensing signal of the resonator in the form of in-phase and quadrature-phase components by an optimization algo...

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Veröffentlicht in:IEEE sensors journal Jg. 24; H. 7; S. 10355 - 10363
Hauptverfasser: Zhou, Mengyang, Xia, Wenliang, Lu, Yulan, Xie, Bo, Chen, Jian, Wang, Junbo, Chen, Deyong
Format: Journal Article
Sprache:Englisch
Veröffentlicht: New York IEEE 01.04.2024
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:
Algorithms
Amplitudes
Analog circuits
Automatic control
Automatic gain control
Closed loop systems
Closed loops
Closed-loop system
Control systems
Excitation
Feedback control
Field programmable gate arrays
field-programmable gate array (FPGA)
Frequency stability
Linear vibration
Linearity
micro-electromechanical system (MEMS) resonant sensor
Microelectromechanical systems
Micromechanical devices
optimization algorithm
Phase locked loops
phase-locked loop (PLL)
Pressure sensors
Quadratures
Resonant frequency
Resonators
Sensor phenomena and characterization
Sensor systems
Sensors
Tracking
ISSN:1530-437X, 1558-1748
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Beschreibung
Zusammenfassung:This article presents a quadrature phase-locked-loop (QPLL)-based digital system for closed-loop control of micro-electromechanical system (MEMS) resonant sensors. The system estimates the sensing signal of the resonator in the form of in-phase and quadrature-phase components by an optimization algorithm, which extends the frequency tracking range and automatically adjusts the amplitude to ensure the linear vibration of the resonator. According to the simulation results, the system has the advantages of fast response and good tracking accuracy. The system has been implemented on a field-programmable gate array (FPGA) development board and validated on an MEMS resonant pressure sensor working by electrostatic excitation and capacitive detection. Experiments show that the proposed system exhibits high linearity, faster startup response, and better frequency stability compared with the previous automatic gain control (AGC)-based analog circuit. Furthermore, the system is widely applicable to sensors with similar resonant characteristics. It has great potential for resonant sensors that require amplitude detection, such as weakly coupled sensors based on the mode-localized phenomenon or parametric coupled sensors subject to blue-sideband excitation.
Bibliographie:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2024.3365864