An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements

Cluster tools play a significant role in the entire process of wafer fabrication. As the width of circuits in semiconductor chips shrinks down to less than 10nm, strict operational constraints are imposed on the operations of cluster tools in order to ensure the quality of processed wafers. Particul...

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Veröffentlicht in:	IEEE transactions on automation science and engineering Jg. 19; H. 3; S. 1 - 15
Hauptverfasser:	Qiao, Yan, Lu, Yanjun, Li, Jie, Zhang, Siwei, Wu, Naiqi, Liu, Bin
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	New York IEEE 01.07.2022 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:	Chamber cleaning Chambers Chemical vapor deposition Cleaning cluster tools Clusters Constraints Cycle time Delays Integer programming Robots Schedules Scheduling semiconductor manufacturing Task analysis Time factors wafer fabrication Wafers
ISSN:	1545-5955, 1558-3783
Online-Zugang:	Volltext
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