Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test

Wafer probing test is crucial for selecting the known good dies via the probe card as the testing signal interface between the tester and the integrated circuits on the fabricated wafers. The consistency of probe cards is critical to ensure the integrity of the testing data. Motivated by realistic n...

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Bibliographic Details
Published in:IEEE transactions on semiconductor manufacturing Vol. 37; no. 4; pp. 567 - 575
Main Authors: Chien, Chen-Fu, Suwattananuruk, Butsayarin
Format: Journal Article
Language:English
Published: New York IEEE 01.11.2024
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:
ISSN:0894-6507, 1558-2345
Online Access:Get full text
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