An Intelligent Particle Filter With Adaptive M-H Resampling for Liquid-Level Estimation During Silicon Crystal Growth

During the growth of silicon single crystals, it is critical to detect the liquid level of the silicon melt to ensure their high-quality production. Because noise statistics are difficult to determine in measured values of the liquid level, a particle filter (PF) with unknown statistics has been pre...

Celý popis

Uložené v:
Podrobná bibliografia
Vydané v:IEEE transactions on instrumentation and measurement Ročník 70; s. 1 - 12
Hlavní autori: Zhang, Xinyu, Liu, Ding, Yang, Yuan, Liang, Junli
Médium: Journal Article
Jazyk:English
Vydavateľské údaje: New York IEEE 2021
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Predmet:
Adaptive filters
Adaptive Metropolis–Hastings (M-H) Resampling
Algorithms
Atmospheric measurements
Crossovers
Crystal growth
Estimation
Furnaces
Heuristic methods
intelligent particle filter (PF)
Liquid levels
liquid-level detection
Liquids
Low weight
Mutation
Noise measurement
Resampling
Silicon
silicon crystal growth
Single crystals
Strategy
ISSN:0018-9456, 1557-9662
On-line prístup:Získať plný text
Tagy: Pridať tag
Žiadne tagy, Buďte prvý, kto otaguje tento záznam!
Popis
Shrnutí:During the growth of silicon single crystals, it is critical to detect the liquid level of the silicon melt to ensure their high-quality production. Because noise statistics are difficult to determine in measured values of the liquid level, a particle filter (PF) with unknown statistics has been presented to estimate the liquid level. However, this approach leads to inaccurate results due to sample impoverishment. To alleviate this problem, we propose an intelligent PF method with an adaptive Metropolis-Hastings (M-H) resampling strategy. To accomplish this, we first design an M-H resampling strategy with two proposed distributions to re-sample low-weight particles. These distributions randomly select high-weight particles for the Gaussian mutations or high-weight and low-weight particles for crossover operations, so as to promote the movement of low-weight particles to high-probability regions. We also construct a self-adaptive function to further improve the overall particle quality, which is used to calculate the selection probability of these two proposed distributions according to the proportion of low-weight particles in all of the particles. Finally, the liquid level is estimated according to the particles after the modified resampling strategy is applied. A comparative evaluation of the proposed method with the adaptive genetic particle filter (AGPF) and the firefly algorithm intelligence optimized particle filter (FAIOPF) is conducted. Some results of the simulation and the practical experiment are presented; they indicate the proposed method offers accuracy improvements in the liquid-level estimation during the silicon crystal growth. More specifically, compared with the AGPF and the FAIOPF, the mean absolute error (MAE) of the proposed method has been reduced by approximately 53.3% and 99.5%, respectively.
Bibliografia:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
ISSN:0018-9456
1557-9662
DOI:10.1109/TIM.2020.3026760