Oxygen-Dependent Instability and Annealing/Passivation Effects in Amorphous In-Ga-Zn-O Thin-Film Transistors

This letter discusses the reason for the instability of amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors (TFTs) under both positive and negative bias stresses. This instability is significantly influenced by the oxygen content in the bulk IGZO and the surrounding environment. The a...

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Vydané v:	IEEE electron device letters Ročník 32; číslo 11; s. 1552 - 1554
Hlavní autori:	Chen, Wei-Tsung, Lo, Shih-Yi, Kao, Shih-Chin, Zan, Hsiao-Wen, Tsai, Chuang-Chuang, Lin, Jian-Hong, Fang, Chun-Hsiang, Lee, Chung-Chun
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	New York, NY IEEE 01.11.2011 Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Predmet:	Annealing Applied sciences Bias Bias stress Devices Electronics Exact sciences and technology IGZO Instability Logic gates Passivation Semiconductor devices Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Stability Stress Stresses Thermal stability Thin film transistors Transistors Amorphous material Oxygen Annealing Electric stress Gallium oxide Indium oxide Relaxation time Zinc IGZO Stress relaxation Zinc oxide Thin film transistor Bias stress stability Passivation
ISSN:	0741-3106, 1558-0563
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Popis
Shrnutí:	This letter discusses the reason for the instability of amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors (TFTs) under both positive and negative bias stresses. This instability is significantly influenced by the oxygen content in the bulk IGZO and the surrounding environment. The as-fabricated low-temperature devices can only endure a single polarized bias stress. An a-IGZO TFT that is stable toward both positive and negative bias stresses with large relaxation times of 95 × 10 4 and 371 × 10 4 s, respectively, is achieved by annealing and passivation.
Bibliografia:	ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 content type line 23
ISSN:	0741-3106 1558-0563
DOI:	10.1109/LED.2011.2165694