Active cluster annotation for wafer map pattern classification in semiconductor manufacturing

•Active cluster annotation is proposed for wafer map pattern classification.•High-performance CNN is achieved with reduced annotation cost.•Multiple wafer maps are annotated in cluster-level annotation.•Cluster-level annotation can yield consistent labels. In semiconductor manufacturing, wafer map p...

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Vydané v:	Expert systems with applications Ročník 183; s. 115429
Hlavní autori:	Shim, Jaewoong, Kang, Seokho, Cho, Sungzoon
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	New York Elsevier Ltd 30.11.2021 Elsevier BV
Predmet:	Active learning Annotations Artificial neural networks Cluster-level annotation Clustering Cost effectiveness Engineers Iterative methods Learning Manufacturing Pattern classification Uncertainty Uncertainty estimation Wafer map pattern classification Wafer map pattern classification Uncertainty estimation Active learning Cluster-level annotation
ISSN:	0957-4174, 1873-6793
On-line prístup:	Získať plný text
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