Polymer self assembly in semiconductor microelectronics

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Bibliographic Details
Published in:	IBM journal of research and development Vol. 51; no. 5; pp. 605 - 633
Main Authors:	Black, C. T., Ruiz, R., Breyta, G., Cheng, J. Y., Colburn, M. E., Guarini, K. W., Kim, H.-C., Zhang, Y.
Format:	Journal Article
Language:	English
Published:	Armonk, NY International Business Machines 01.09.2007
Subjects:	Applied sciences Cross-disciplinary physics: materials science; rheology Electronics Exact sciences and technology Materials science Methods of nanofabrication Microelectronic fabrication (materials and surfaces technology) Physics Self-assembly Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Integrated circuits Nanometer scale High performance Self-assembly Microelectronic fabrication Patterning Self organization Semiconductor materials Semiconductor devices Lithography High-resolution methods Semiconductor technology
ISSN:	0018-8646, 0018-8646
Online Access:	Get full text
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Description
ISSN:	0018-8646 0018-8646
DOI:	10.1147/rd.515.0605