Depth Profile Analysis on the Nanometer Scale by a Combination of Electron Probe Microanalysis (EPMA) and Focused Ion Beam Specimen Preparation (FIB)

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Bibliographic Details
Published in:	Mikrochimica acta (1966) Vol. 145; no. 1-4; pp. 187 - 192
Main Authors:	B ckins, Matthias, Aretz, Anke, Richter, Silvia, Kyrsta, Stepan, Sp hn, Michael, Mayer, Joachim
Format:	Journal Article
Language:	English
Published:	01.04.2004
ISSN:	0026-3672, 1436-5073
Online Access:	Get full text
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ISSN:	0026-3672 1436-5073
DOI:	10.1007/s00604-003-0151-9