The atomic layer thermopile heat flux sensor based on the inclined epitaxial YBa2Cu3O7-δ films

•Highly c-axis oriented YBCO films are prepared on miscut 12° LaAlO3 substrates.•The ALTP heat flux sensor with high sensitivity of 17.54 μV/(kW/m2) is obtained.•The response frequency of ALTP heat flux sensor is over 1 MHz at −3dB. The atomic layer thermopile (ALTP) heat flux sensor based on highly...

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Bibliographic Details

Published in:	Materials letters Vol. 330; p. 133336
Main Authors:	Chen, Xi, Tao, Bowan, Zhao, Ruipeng, Yang, Kai, Li, Zhenzhe, Xie, Tian, Zhong, Yao, Zhang, Tong, Xia, Yudong
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 01.01.2023
Subjects:	Atomic layer thermopile Epitaxial growth Sensors Thin films YBCO Thin films Atomic layer thermopile Sensors Epitaxial growth YBCO
ISSN:	0167-577X, 1873-4979
Online Access:	Get full text
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