The atomic layer thermopile heat flux sensor based on the inclined epitaxial YBa2Cu3O7-δ films

•Highly c-axis oriented YBCO films are prepared on miscut 12° LaAlO3 substrates.•The ALTP heat flux sensor with high sensitivity of 17.54 μV/(kW/m2) is obtained.•The response frequency of ALTP heat flux sensor is over 1 MHz at −3dB. The atomic layer thermopile (ALTP) heat flux sensor based on highly...

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Bibliographic Details
Published in:Materials letters Vol. 330; p. 133336
Main Authors: Chen, Xi, Tao, Bowan, Zhao, Ruipeng, Yang, Kai, Li, Zhenzhe, Xie, Tian, Zhong, Yao, Zhang, Tong, Xia, Yudong
Format: Journal Article
Language:English
Published: Elsevier B.V 01.01.2023
Subjects:
Atomic layer thermopile
Epitaxial growth
Sensors
Thin films
YBCO
Thin films
Atomic layer thermopile
Sensors
Epitaxial growth
YBCO
ISSN:0167-577X, 1873-4979
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Summary:•Highly c-axis oriented YBCO films are prepared on miscut 12° LaAlO3 substrates.•The ALTP heat flux sensor with high sensitivity of 17.54 μV/(kW/m2) is obtained.•The response frequency of ALTP heat flux sensor is over 1 MHz at −3dB. The atomic layer thermopile (ALTP) heat flux sensor based on highly c-axis oriented YBa2Cu3O7-δ (YBCO) films prepared on miscut 12° LaAlO3 substrates using magnetron sputtering is achieved. Benefiting from good biaxial texture, the YBCO film maintains a large Seebeck coefficient anisotropy, so the sensitivity of the ALTP heat flux sensor reaches 17.54 μV/(kW/m2). In addition, the response frequency of the sensor is higher than 1 MHz due to the high electrical conductivity of the prepared YBCO films, which is also higher than the current maximum (650 kHz) reported in the literature. These results indicate that our ALTP heat flux sensor can realize high-frequency heat flux detection above 1 MHz.
ISSN:0167-577X
1873-4979
DOI:10.1016/j.matlet.2022.133336