Practical iterated fill synthesis for CMP uniformity

We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We experimentally study the tradeoffs between two main filling objectives: minimizing density variation, and minimizing the total amount of inserted fi...

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Vydáno v:37th Design Automation Conference, 2000 s. 671 - 674
Hlavní autoři: Chen, Yu, Kahng, Andrew B., Robins, Gabriel, Zelikovsky, Alexander
Médium: Konferenční příspěvek
Jazyk:angličtina
Vydáno: New York, NY, USA ACM 01.01.2000
IEEE
Edice:ACM Conferences
Témata:
Applied computing > Physical sciences and engineering > Electronics
Applied computing > Physical sciences and engineering > Engineering
Chemical processes
Computational geometry
Computer science
Filling
Greedy algorithms
Hardware > Electronic design automation > Physical design (EDA)
Hardware > Emerging technologies
Hardware > Robustness
Hardware > Very large scale integration design
Linear programming
Manufacturing processes
Mathematics of computing > Mathematical analysis > Mathematical optimization > Continuous optimization > Linear programming
Permission
Semiconductor device modeling
Solid modeling
Theory of computation > Design and analysis of algorithms > Mathematical optimization > Continuous optimization > Linear programming
ISBN:9781581131871, 1581131879
On-line přístup:Získat plný text
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