Practical iterated fill synthesis for CMP uniformity
We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We experimentally study the tradeoffs between two main filling objectives: minimizing density variation, and minimizing the total amount of inserted fi...
Gespeichert in:
| Veröffentlicht in: | 37th Design Automation Conference, 2000 S. 671 - 674 |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Tagungsbericht |
| Sprache: | Englisch |
| Veröffentlicht: |
New York, NY, USA
ACM
01.01.2000
IEEE |
| Schriftenreihe: | ACM Conferences |
| Schlagworte: | |
| ISBN: | 9781581131871, 1581131879 |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Abstract | We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We experimentally study the tradeoffs between two main filling objectives: minimizing density variation, and minimizing the total amount of inserted fill. Comparisons with previous filling methods show the advantages of our new iterated Monte-Carlo and iterated greedy methods. We achieve near-optimal filling with respect to each of the objectives and for both density models (spatial density [3] and effective density [8]). Our new methods are more efficient in practice than linear programming [3] and more accurate than non-iterated Monte-Carlo approaches [1]. |
|---|---|
| AbstractList | We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We experimentally study the tradeoffs between two main filling objectives: minimizing density variation, and minimizing the total amount of inserted fill. Comparisons with previous filling methods show the advantages of our new iterated Monte-Carlo and iterated greedy methods. We achieve near-optimal filling with respect to each of the objectives and for both density models (spatial density [3] and effective density [8]). Our new methods are more efficient in practice than linear programming [3] and more accurate than non-iterated Monte-Carlo approaches [1]. |
| Author | Kahng, Andrew B. Chen, Yu Zelikovsky, Alexander Robins, Gabriel |
| Author_xml | – sequence: 1 givenname: Yu surname: Chen fullname: Chen, Yu organization: UCLA Computer Science Dept., Los Angeles, CA – sequence: 2 givenname: Andrew B. surname: Kahng fullname: Kahng, Andrew B. organization: UCLA Computer Science Dept., Los Angeles, CA – sequence: 3 givenname: Gabriel surname: Robins fullname: Robins, Gabriel organization: Department of Computer Science, University of Virginia, Charlottesville, VA – sequence: 4 givenname: Alexander surname: Zelikovsky fullname: Zelikovsky, Alexander organization: Department of Computer Science, Georgia State University, Atlanta, GA |
| BookMark | eNqFUD1PwzAUtARIQMnIwpSJiRQ7jmN7RBUFpCI6wGzZzrMw5KPY7tB_j1GQGHnLPenufdydo-NxGgGhS4KXhDTsllJey3qZoSX4CBWSC8IEIZQITk5REeMHzsVZLbA4Q802aJu81X3pEwSdoCud7_syHsb0DtHH0k2hXD1vy_3oczv4dLhAJ073EYpfXKC39f3r6rHavDw8re42laYNSZVoLXaNZDXwFhsOrKGic6IjtQHackeohtoxsNxaI7XoaNOCZQab_Foepgt0Pe_dhelrDzGpwUcLfa9HmPZR0WxYZmtZeDULPQCoXfCDDgclGKNSZvJmJrUdlJmmz6gIVj9hqTksNYelTPDg_o7-I6ffsd9p6w |
| ContentType | Conference Proceeding |
| Copyright | 2000 ACM |
| Copyright_xml | – notice: 2000 ACM |
| DBID | 6IE 6IH CBEJK RIE RIO 7SC 8FD JQ2 L7M L~C L~D |
| DOI | 10.1145/337292.337610 |
| DatabaseName | IEEE Electronic Library (IEL) Conference Proceedings IEEE Proceedings Order Plan (POP) 1998-present by volume IEEE Xplore All Conference Proceedings IEEE Electronic Library (IEL) IEEE Proceedings Order Plans (POP) 1998-present Computer and Information Systems Abstracts Technology Research Database ProQuest Computer Science Collection Advanced Technologies Database with Aerospace Computer and Information Systems Abstracts Academic Computer and Information Systems Abstracts Professional |
| DatabaseTitle | Computer and Information Systems Abstracts Technology Research Database Computer and Information Systems Abstracts – Academic Advanced Technologies Database with Aerospace ProQuest Computer Science Collection Computer and Information Systems Abstracts Professional |
| DatabaseTitleList | Computer and Information Systems Abstracts |
| Database_xml | – sequence: 1 dbid: RIE name: IEEE Electronic Library (IEL) url: https://ieeexplore.ieee.org/ sourceTypes: Publisher |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Computer Science |
| EndPage | 674 |
| ExternalDocumentID | 855399 |
| Genre | orig-research Conference Paper |
| GroupedDBID | 6IE 6IH 6IK 6IL AAJGR AAVQY ACM ADPZR ALMA_UNASSIGNED_HOLDINGS APO BEFXN BFFAM BGNUA BKEBE BPEOZ CBEJK GUFHI IERZE OCL RIE RIL RIO AAWTH LHSKQ 7SC 8FD JQ2 L7M L~C L~D |
| ID | FETCH-LOGICAL-a341t-86c0f4952e760b7e5438df8d12be367f13ae2f5ec7ccb9a8d346ec5b0b80886c3 |
| IEDL.DBID | RIE |
| ISBN | 9781581131871 1581131879 |
| ISICitedReferencesCount | 39 |
| ISICitedReferencesURI | http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=000166739300123&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| IngestDate | Thu Jul 10 16:46:50 EDT 2025 Wed Aug 27 02:38:16 EDT 2025 Wed Jan 31 06:47:06 EST 2024 |
| IsDoiOpenAccess | false |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | true |
| Language | English |
| License | Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from Permissions@acm.org |
| LinkModel | DirectLink |
| MeetingName | DAC00: ACM/IEEE-CAS/EDAC Design Automation Conference |
| MergedId | FETCHMERGED-LOGICAL-a341t-86c0f4952e760b7e5438df8d12be367f13ae2f5ec7ccb9a8d346ec5b0b80886c3 |
| Notes | SourceType-Conference Papers & Proceedings-1 ObjectType-Conference Paper-1 content type line 25 |
| OpenAccessLink | https://dl.acm.org/doi/pdf/10.1145/337292.337610 |
| PQID | 31459113 |
| PQPubID | 23500 |
| PageCount | 4 |
| ParticipantIDs | ieee_primary_855399 acm_books_10_1145_337292_337610_brief proquest_miscellaneous_31459113 acm_books_10_1145_337292_337610 |
| PublicationCentury | 2000 |
| PublicationDate | 2000-01-01 |
| PublicationDateYYYYMMDD | 2000-01-01 |
| PublicationDate_xml | – month: 01 year: 2000 text: 2000-01-01 day: 01 |
| PublicationDecade | 2000 |
| PublicationPlace | New York, NY, USA |
| PublicationPlace_xml | – name: New York, NY, USA |
| PublicationSeriesTitle | ACM Conferences |
| PublicationTitle | 37th Design Automation Conference, 2000 |
| PublicationTitleAbbrev | DAC |
| PublicationYear | 2000 |
| Publisher | ACM IEEE |
| Publisher_xml | – name: ACM – name: IEEE |
| SSID | ssj0000752808 |
| Score | 1.7662029 |
| Snippet | We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We... |
| SourceID | proquest ieee acm |
| SourceType | Aggregation Database Publisher |
| StartPage | 671 |
| SubjectTerms | Applied computing -- Physical sciences and engineering -- Electronics Applied computing -- Physical sciences and engineering -- Engineering Chemical processes Computational geometry Computer science Filling Greedy algorithms Hardware -- Electronic design automation -- Physical design (EDA) Hardware -- Emerging technologies Hardware -- Robustness Hardware -- Very large scale integration design Linear programming Manufacturing processes Mathematics of computing -- Mathematical analysis -- Mathematical optimization -- Continuous optimization -- Linear programming Permission Semiconductor device modeling Solid modeling Theory of computation -- Design and analysis of algorithms -- Mathematical optimization -- Continuous optimization -- Linear programming |
| Title | Practical iterated fill synthesis for CMP uniformity |
| URI | https://ieeexplore.ieee.org/document/855399 https://www.proquest.com/docview/31459113 |
| WOSCitedRecordID | wos000166739300123&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV09T8MwELVoxcBUKEWUTw8wpk1iO3HmioqFqgNI3azEPkuV2hQ1DRL_nnOclgEkxJIPKbaiZ8d3vst7R8iDRTdCSsMDbq3AQ2iCIgII0DaGRmqZRaCbYhPpbCYXi2ze6mw3XBgAaH4-g5G7bHL5ZqNrFyobS-F0VDukk6aJp2odwilo-WIZSkfdEjKKmCui3So67e-jvcQmF2PmslXxCE-J4852cr1uy6v8WJMbQzPt_esVT8ngm7BH5wdTdEaOoOyT3r5iA20_4HPCvTwRjgv1cspgqF2uVrT6LNETrJYVRSeWTl7mtC4dZ2uNTvqAvE2fXifPQVs3IcjRJu0CmejQ4sYnhjQJixQEZ9JYaaK4AJakNmI5xFaATrUuslwaxhPQoggLRBAbswvSLTclXBLaJF5Zxg1wyyHTRSIM9gYmi2JA12VI7hE65TYElfIcZ6E8uMqDOySPfzyhiu0S7JD0HZrq3YtsKA8k9r8fDYXz3iUz8hI2daUY9oMLNbv6td01OfGceRcruSHd3baGW3KsP3bLanvXTJ0vDZy8Bw |
| linkProvider | IEEE |
| linkToHtml | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1LS8QwEB58gZ584_rMQY_Vtkna9CyK4u6yBwVvoU0msKBd2e4K_nsnTVcPCuKlD2hC-ZJmJjP9vgE4d-RGKGVFJJyTdIhtVCWIEdnG2CqjigRNW2wiHw7V83Mx6nS2Wy4MIrY_n-Glv2xz-XZi5j5UdqWk11FdhlUpRBoHstZXQIVsX6pi5clbUiUJ92W0O02nxX2yENkU8or7fFV6SafMs2eXS_PaFVj5sSq3puZ2818vuQV735Q9NvoyRtuwhPUObC5qNrDuE94FEQSKaGRYEFRGy9z45YU1HzX5gs24YeTGsuvBiM1rz9p6JTd9D55ubx6v76KuckJUklWaRSozsaOtT4p5Flc5SsGVdcomaYU8y13CS0ydRJMbUxWlslxkaGQVV4QgNeb7sFJPajwA1qZeeSEsCiewMFUmLfWGtkhSJOelB2cEnfZbgkYHlrPUAVwdwO3BxR9P6Go6RteDHY-mfgsyGzoASf0vRkPTzPfpjLLGybzRnPqhpZof_truDNbvHgd93b8fPhzBRmDQ-8jJMazMpnM8gTXzPhs309N2Gn0CCM-_Tg |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.genre=proceeding&rft.title=37th+Design+Automation+Conference%2C+2000&rft.atitle=Practical+iterated+fill+synthesis+for+CMP+uniformity&rft.au=Chen%2C+Yu&rft.au=Kahng%2C+Andrew+B&rft.au=Robins%2C+Gabriel&rft.au=Zelikovsky%2C+Alexander&rft.date=2000-01-01&rft.isbn=9781581131871&rft.spage=671&rft.epage=674&rft_id=info:doi/10.1145%2F337292.337610&rft.externalDBID=NO_FULL_TEXT |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=9781581131871/lc.gif&client=summon&freeimage=true |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=9781581131871/mc.gif&client=summon&freeimage=true |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=9781581131871/sc.gif&client=summon&freeimage=true |