Two-dimensional nonplanar process simulation /

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Bibliographic Details
Main Author: Wimmer, Karl
Format: Thesis Book
Language:English
Published: Wien : Technická univerzita, 1994
Edition:[1st ed.]
Series:Dissertationen Band 61
Subjects:
integrovaný obvod > implantácia iónov > simulácia Monte Carlo > difúzia > tepelné žíhanie > nelineárna parciálna diferenciálna rovnica
ISBN:3854370814
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