Simulation der Ionenimplantation in kristalline Siliziumstrukturen /

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Bibliographic Details
Main Author: Bohmayr, Walter
Format: Thesis Book
Language:German
Published: Wien : Technická univerzita, 1997
Edition:[1. Aufl.]
Series:Dissertationen Band 77
Subjects:
ISBN:3854370555
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Call Number: A557038
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