FIZIČESKIJE OSNOVY SUBMIKRONNOJ LITOGRAFII V MIKROELEKTRONIKE /
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| Main Author: | |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | Russian |
| Published: |
Moskva :
Radio i svjaz,
1984
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| Online Access: |
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| 100 | 1 | |a Valijev, Kamil Achmetovič | |
| 242 | 1 | 0 | |a FYZIKÁLNE ZÁKLADY SUBMIKROMETROVEJ LITOGRAFIE V MIKROELEKTRONIKE |
| 245 | 1 | 0 | |a FIZIČESKIJE OSNOVY SUBMIKRONNOJ LITOGRAFII V MIKROELEKTRONIKE / |c Kamil Achmetovič Valijev, Aleksandr Vasiljevič Rakov ; Red.: V. M. Larionova |
| 260 | |a Moskva : |b Radio i svjaz, |c 1984 | ||
| 300 | |a 349 S. : |b grafy, lit., obr. ; | ||
| 700 | 1 | |a Rakov, Aleksandr Vasiljevič | |
| 700 | 1 | |a Larionova, V. M. |4 edt | |
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