Preparation and electrical characterization of silicon structures formed by wafer bonding /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
Göteborg :
Chalmers Tekniska Högskola,
1991
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| Edition: | 1st ed. |
| Series: | TECHNICAL report
No. 223 |
| Subjects: | |
| ISBN: | 917032655X |
| Online Access: |
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CVTI sklad absenčný
| Call Number: |
A528393 |
|---|---|
| Copy | On Shelf |