Integrated micro-motion systems. Micromachining, control and applications : A collection of contributions based on lectures presented at the 3rd Toyota conf., Aichi, Japan, 22 - 25 Oct. 1989 /
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Amsterdam :
Elsevier,
1990
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| ISBN: | 0444884173 |
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