MEMS product development : from concept to commercialization /

"In this incredibly useful book, the mysteries of MEMS development and manufacturing are spelled out in a clear and thorough and incredibly detailed manner ... I wish I had access to this book during several of my own companies."--Kurt Petersen Drawing on their experiences in successfully...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Fitzgerald, Alissa M., White, Carolyn D. (VerfasserIn), Chung, Charles C. (VerfasserIn)
Format: E-Book
Sprache:Englisch
Veröffentlicht: Cham : Springer, 2021.
Schriftenreihe:Microsystems and Nanosystems
Schlagworte:
Microelectromechanical systems.
Nanotechnology.
Manufactures.
Micro-Electrical-Mechanical Systems
Manufactured Materials
Microsystèmes électromécaniques.
Produits manufacturés.
mikroelektromechanické systémy
nanotechnológia
výroba
Electronic books.
ISBN:9783030617097, 3030617092, 9783030617103, 3030617106, 9783030617110, 3030617114
Online-Zugang: Volltext
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Inhaltsangabe:
  • Intro
  • Foreword
  • Preface
  • Acknowledgements
  • Abbreviations
  • Contents
  • About the Authors
  • Part I: Context and Overview
  • Chapter 1: The Opportunities and Challenges of MEMS Product Development
  • Why Are MEMS So Challenging?
  • Three-Dimensional Features Impede Process Flow Standardization
  • Complex Processes and Microscale Physics Impair Precise Simulation
  • MEMS Foundries Must Qualify each New Process Flow
  • Planning for Successful MEMS Product Development
  • Summary
  • References
  • Chapter 2: Economics of Semiconductor Device Manufacturing and Impacts on MEMS Product Development
  • Economics of Silicon Wafer Manufacturing
  • Parallel Fabrication Enables Economy of Scale
  • Large Product Volumes Defray the Huge Capital Cost of Wafer Fabs
  • Captive Fabs, Foundries, and the Fabless Model
  • How MEMS Production Differs from Semiconductor Production
  • MEMS Devices Are Physically Different from Electronic Semiconductor Devices
  • MEMS Lack Standard Processes
  • MEMS Products Have Lower Wafer Volumes per Process
  • Summary
  • References
  • Chapter 3: Stages of MEMS Product Development
  • The Five Stages to Commercialize a MEMS Product
  • Proof-of-Concept Prototype
  • Advanced Prototypes
  • Foundry Feasibility
  • Foundry Pilot Production Stage
  • Foundry Production
  • Funding and Schedule for the Five Stages
  • Typical Budget and Timeline for Stages of Development
  • Secure Continuous Funding for Efficient Product Development
  • Summary
  • References
  • Part II: Business Requirements for a Viable Product
  • Chapter 4: What Is the Product? Requirements Analysis
  • Understanding the Market
  • Market Perspective Frames Product Requirements Analysis
  • Technology Push
  • Market Pull
  • Which Parties Dictate the Product Requirements?
  • Understanding Technical Requirements
  • Functional Requirements
  • Environmental Requirements
  • Interface and Package Requirements
  • Calibration Requirements
  • Quality and Regulatory Requirements
  • Understanding Business Requirements
  • Unit Price Requirements
  • Overcoming Existing Barriers to Entry
  • Satisfying Intermediary Integrators
  • Arranging Security of Supply
  • Summary
  • References
  • Chapter 5: Is There a Business Opportunity? Product Unit Cost Modeling
  • Rough Order of Magnitude Unit Cost
  • Step 1: Calculate Number of Wafers Needed to Fabricate the Number of Units to be Sold in a Year
  • Step 2: Calculate ROM MEMS Die Unit Cost
  • Gain Insights from Parameter Sensitivity Analyses
  • Detailed Unit Cost Model
  • Step 1: Identify all Operations or Components of the Finished MEMS Product and Expected Yield for each
  • Step 2: Gather Cost Data for each Manufacturing Operation
  • Step 3: Assemble Model and Perform Parameter Sensitivity Analyses

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