MEMS product development : from concept to commercialization /

"In this incredibly useful book, the mysteries of MEMS development and manufacturing are spelled out in a clear and thorough and incredibly detailed manner ... I wish I had access to this book during several of my own companies."--Kurt Petersen Drawing on their experiences in successfully...

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Bibliographic Details

Main Authors:	Fitzgerald, Alissa M., White, Carolyn D. (Author), Chung, Charles C. (Author)
Format:	eBook
Language:	English
Published:	Cham : Springer, 2021.
Series:	Microsystems and Nanosystems
Subjects:	Microelectromechanical systems. Nanotechnology. Manufactures. Micro-Electrical-Mechanical Systems Manufactured Materials Microsystèmes électromécaniques. Produits manufacturés. mikroelektromechanické systémy nanotechnológia výroba Electronic books.
ISBN:	9783030617097, 3030617092, 9783030617103, 3030617106, 9783030617110, 3030617114
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