Investigation of hard carbon thin films prepared by RF plasma deposition from hydrocarbon gases and vapours /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Brno :
Masarykova univerzita,
1991
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| Edition: | 1st ed. |
| Series: | Physica : Facultatis Scientiarum Naturalium Univ. Masarykianae Brunensis
Vol. 48 |
| Subjects: | |
| ISBN: | 802103537 |
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