Micro and Nano Fabrication Technology

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and ad...

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Bibliographic Details

Format:	Electronic eBook
Language:	English
Published:	Singapore : Springer Singapore , 2018.
Edition:	1st ed. 2018.
Series:	Micro/Nano Technologies,
Subjects:	Nanotechnology. Medicine. Biomedical engineering.
ISBN:	9789811300981
ISSN:	2522-5065
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