Micro and Nano Fabrication Technology
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and ad...
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| Format: | Electronic eBook |
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| Language: | English |
| Published: |
Singapore :
Springer Singapore ,
2018.
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| Edition: | 1st ed. 2018. |
| Series: | Micro/Nano Technologies,
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| Subjects: | |
| ISBN: | 9789811300981 |
| ISSN: | 2522-5065 |
| Online Access: |
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| Call Number: |
ZE08888 |
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| Copy | On Shelf |