Micro and Nano Fabrication Technology

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and ad...

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Médium: Elektronický zdroj E-kniha
Jazyk:angličtina
Vydáno: Singapore : Springer Singapore , 2018.
Vydání:1st ed. 2018.
Edice:Micro/Nano Technologies,
Témata:
Nanotechnology.
Medicine.
Biomedical engineering.
ISBN:9789811300981
ISSN:2522-5065
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Obsah:
  • Part 1 Cutting technology
  • Chapter 1 Micro chiseling of retroreflective arrays
  • Chapter 2 Micro milling for functional surface
  • Chapter 3 Micro cylindrical turning of calcium fluoride
  • Chapter 4 Nanogrooving by using multi-tip diamond tools
  • Chapter 5 Elliptical vibration cutting for difficult-to-cut materials
  • Chapter 6 Micro machining of roller mould for roll-to-roll manufacturing
  • Chapter 7 Tool servo-driven diamond turning for structured surface
  • Part 2 Abrasive/tip-based machining technology
  • Chapter 8 Micro/nano texturing by ultrasonic assisted grinding
  • Chapter 9 Precision grinding for functional micro-structured surface
  • Chapter 10 Micro fluid jet polishing
  • Chapter 11 Bonnet polishing of microstructured surface
  • Chapter 12 Soft-brittle semiconductors polishing with environment-friendly slurries
  • Chapter 13 Three-dimensional fabrication of micro/nanostructure using scanning probe lithography
  • Part 3 High-energy beam machining technology
  • Chapter 14 Femtosecond laser direct writing
  • Chapter 15 Laser patterning of metallic glass
  • Chapter 16 Ion beam machining
  • Chapter 17 Electron beam machining
  • Chapter 18 Microfabrication by laser lithography combined with ion etching
  • Part 4 Molding/forming/self-organization technology
  • Chapter 19 Replication of Micro/Nanostructures
  • Chapter 20 Precision Molding of Microstructures on Chalcogenide Glass for Infrared Optics
  • Chapter 21 Press molding of hybrid Fresnel lenses for infrared applications
  • Chapter 22 Microspring fabrication by anisotropic gelation
  • Chapter 23 Fabrication of Metallic Nanodot Arrays
  • Chapter 24 Surface micro/nano-structuring using Self-assembly of fine particles
  • Part 5 Physical/chemical machining technology
  • Chapter 25 Micro electrical discharge machining of hard brittle materials
  • Chapter 26 Micro Electrochemical Machining
  • Chapter 27 Catalytic AFM-based nanofabrication
  • Chapter 28 3D Microfabrication using photocatalytic reaction
  • Chapter 29 Silicon etching for multiple-height microstructures
  • Chapter 30 Local wettability modification and its micro-fluidic system application.

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