Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact /

This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on...

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Bibliographic Details

Main Author:	Claeys, Cor (Author)
Format:	Electronic eBook
Language:	English
Published:	Cham : Springer International Publishing, 2018.
Edition:	1st ed. 2018.
Series:	Springer Series in Materials Science, 270
Subjects:	Optical materials. Electronic materials. Microwaves. Optical engineering. Semiconductors. Electronic circuits. Materials science.
ISBN:	9783319939254
ISSN:	0933-033X ;
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