Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact /

This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on...

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Hlavní autor:	Claeys, Cor (Autor)
Médium:	Elektronický zdroj E-kniha
Jazyk:	angličtina
Vydáno:	Cham : Springer International Publishing, 2018.
Vydání:	1st ed. 2018.
Edice:	Springer Series in Materials Science, 270
Témata:	Optical materials. Electronic materials. Microwaves. Optical engineering. Semiconductors. Electronic circuits. Materials science.
ISBN:	9783319939254
ISSN:	0933-033X ;
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