Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact /

This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on...

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Hlavný autor: Claeys, Cor (Autor)
Médium: Elektronický zdroj E-kniha
Jazyk:English
Vydavateľské údaje: Cham : Springer International Publishing, 2018.
Vydanie:1st ed. 2018.
Edícia:Springer Series in Materials Science, 270
Predmet:
Optical materials.
Electronic materials.
Microwaves.
Optical engineering.
Semiconductors.
Electronic circuits.
Materials science.
ISBN:9783319939254
ISSN:0933-033X ;
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Obsah:
  • Preface
  • Introduction
  • Basic Properties of Metals in Semiconductors
  • Sources of Metals in Si and Ge Processing
  • Characterization and Detection of Metals in Silicon and Germanium
  • Electrical Activity of Metals in Si and Ge
  • Impact of Metals on Silicon Devices and Circuits
  • Gettering and Passivation of Metals in Silicon and Germanium
  • Modeling and Simulation of Metals in Silicon and Germanium
  • Conclusions.

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