Fundamentals of microfabrication and nanotechnology. Volume I, solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton :
CRC Press,
2012
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| Edition: | 3rd ed. |
| Subjects: | |
| ISBN: | 9781420055115 |
| Online Access: |
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