Fundamentals of microfabrication and nanotechnology. Volume I, solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /

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Bibliographic Details
Main Author: Madou, Marc J., 1953- (Author)
Format: Book
Language:English
Published: Boca Raton : CRC Press, 2012
Edition:3rd ed.
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ISBN:9781420055115
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Call Number: A615087
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