Fundamentals of microfabrication and nanotechnology. Volume I, solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
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| Hlavní autor: | |
|---|---|
| Médium: | Kniha |
| Jazyk: | angličtina |
| Vydáno: |
Boca Raton :
CRC Press,
2012
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| Vydání: | 3rd ed. |
| Témata: | |
| ISBN: | 9781420055115 |
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| 100 | 1 | |a Madou, Marc J., |d 1953- |4 aut | |
| 245 | 1 | 0 | |a Fundamentals of microfabrication and nanotechnology. |n Volume I, |p solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / |c Marc J. Madou |
| 250 | |a 3rd ed. | ||
| 260 | |a Boca Raton : |b CRC Press, |c 2012 | ||
| 300 | |a XIII, 641 s. : |b fotogr., grafy, lit., obr., tab. ; |c 29 cm | ||
| 653 | 1 | |a nanotechnológia | |
| 653 | 1 | |a mikroelektronika | |
| 653 | 1 | |a mikromechanika | |
| 653 | 1 | |a fyzika pevných látok | |
| 653 | 1 | |a fotonika | |
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