Fundamentals of microfabrication and nanotechnology. Volume I, solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /

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Bibliographic Details
Main Author: Madou, Marc J., 1953- (Author)
Format: Book
Language:English
Published: Boca Raton : CRC Press, 2012
Edition:3rd ed.
Subjects:
nanotechnológia
mikroelektronika
mikromechanika
fyzika pevných látok
fotonika
odborné publikácie
ISBN:9781420055115
Online Access: Get full text
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Description
Physical Description:XIII, 641 s. : fotogr., grafy, lit., obr., tab. ; 29 cm
ISBN:9781420055115

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