Nucleation of damage centres during ion implantation of silicon /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Roskilde :
Danish Atomic Energy Commission,
1970
|
| Edition: | [1st ed.] |
| Series: | Research Establishment Risö
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| Subjects: | |
| Online Access: |
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| 100 | 1 | |a Chadderton, Lewis T. | |
| 245 | 1 | 0 | |a Nucleation of damage centres during ion implantation of silicon / |c Lewis T. Chadderton |
| 250 | |a [1st ed.] | ||
| 260 | |a Roskilde : |b Danish Atomic Energy Commission, |c 1970 | ||
| 300 | |a 25 s. | ||
| 490 | 1 | |a Research Establishment Risö |3 0547203 | |
| 653 | 1 | |a iónová implantácia |a kremík |a nukleácia | |
| 760 | 1 | |t Research Establishment Risö | |
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| 992 | |a AMG | ||
| 999 | |c 170310 |d 170310 | ||