MEMS : design and applications : ASDAM 2002 on advanced semiconductor devices and microsystems, Smolenice, Oct. 13, 2002 /
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| Format: | Book |
| Language: | English |
| Published: |
Trenčín :
University of A. Dubček,
2002
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| Edition: | [1st ed.] |
| Subjects: | |
| ISBN: | 8088914744 |
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