Interference pattern generation in evanescent electromagnetic waves for nanoscale lithography using waveguide diffraction gratings

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Název: Interference pattern generation in evanescent electromagnetic waves for nanoscale lithography using waveguide diffraction gratings
Přispěvatelé: Kazanskii, N [Institute for Image Processing Systems, Russian Academy of Sciences, Samara (Russian Federation)]
Zdroj: Quantum Electronics (Woodbury, N.Y.); 41; 8; Other Information: DOI: 10.1070/QE2011v041n08ABEH014500
Popis souboru: Medium: X; Size: page(s) 759-764
Přístupová URL adresa: http://www.osti.gov/scitech/biblio/21552632
Databáze: SciTech Connect
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ISSN:10637818
DOI:10.1070/QE2011V041N08ABEH014500