Diffraction grating structure and method for manufacturing same
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| Název: | Diffraction grating structure and method for manufacturing same |
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| Patent Number: | 8,254,028 |
| Datum vydání: | August 28, 2012 |
| Appl. No: | 12/192031 |
| Application Filed: | August 14, 2008 |
| Abstrakt: | A diffraction grating structure comprises a substrate having a first surface and a second surface opposite to the first surface. A first grating is defined on the first surface and a second grating is defined on the second surface. The first grating includes a plurality of first grooves and has a first grating period. The second grating includes a plurality of second grooves and has a second grating period. The first groove and the second groove are formed by a fast tool servo system. |
| Inventors: | Chang, Jen-Tsorng (Taipei Hsien, TW) |
| Assignees: | Hon Hai Precision Industry Co., Ltd. (Tu-Cheng, New Taipei, TW) |
| Claim: | 1. A diffraction grating structure comprising: a substrate having a first surface and a second surface opposite to the first surface, wherein a first grating is defined on the first surface and a second grating is defined on the second surface, the first grating includes a plurality of first grooves and has a first grating period d 1 , and the second grating includes a plurality of second grooves and has a second grating period d 2 , and wherein the profile of the first grooves of the first grating are described by the following function: [mathematical expression included] and the profile of the second grooves of the second grating are described by the following function: [mathematical expression included] where θ is a half of angle of two coherent beams radiating on the diffraction grating structure, tan θ represents the tangent of the angle θ, x1 is a longitudinal coordinate which has an origin at the centre of the first grating, and x2 is another longitudinal coordinate which has another origin at the centre of the second grating. |
| Claim: | 2. The diffraction grating structure as claimed in claim 1 , wherein the first grating period is equal to the second grating period. |
| Claim: | 3. The diffraction grating structure as claimed in claim 2 , wherein the first grooves are misaligned with the second grooves. |
| Claim: | 4. The diffraction grating structure as claimed in claim 2 , wherein the first grooves are aligned with the second grooves. |
| Claim: | 5. The diffraction grating structure as claimed in claim 1 , wherein the first grating period is less than the second grating period. |
| Current U.S. Class: | 359/569 |
| Patent References Cited: | 4012843 March 1977 Harada et al. 5029154 July 1991 Sumi et al. 5258871 November 1993 Gupta |
| Primary Examiner: | Amari, Alessandro |
| Attorney, Agent or Firm: | Altis Law Group, Inc. |
| Přístupové číslo: | edspgr.08254028 |
| Databáze: | USPTO Patent Grants |
| Abstrakt: | A diffraction grating structure comprises a substrate having a first surface and a second surface opposite to the first surface. A first grating is defined on the first surface and a second grating is defined on the second surface. The first grating includes a plurality of first grooves and has a first grating period. The second grating includes a plurality of second grooves and has a second grating period. The first groove and the second groove are formed by a fast tool servo system. |
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