DIFFRACTION GRATING STRUCTURE AND METHOD FOR MANUFACTURING SAME

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Názov: DIFFRACTION GRATING STRUCTURE AND METHOD FOR MANUFACTURING SAME
Document Number: 20090116110
Dátum vydania: May 7, 2009
Appl. No: 12/192031
Application Filed: August 14, 2008
Abstrakt: A diffraction grating structure comprises a substrate having a first surface and a second surface opposite to the first surface. A first grating is defined on the first surface and a second grating is defined on the second surface. The first grating includes a plurality of first grooves and has a first grating period. The second grating includes a plurality of second grooves and has a second grating period. The first groove and the second groove are formed by a fast tool servo system.
Inventors: CHANG, JEN-TSORNG (Tu-Cheng, TW)
Assignees: HON HAI PRECISION INDUSTRY CO., LTD. (Tu-Cheng,Taipei Hsien, TW)
Claim: 1. A diffraction grating structure comprising: a substrate having a first surface and a second surface opposite to the first surface, wherein a first grating is defined on the first surface and a second grating is defined on the second surface, the first grating includes a plurality of first grooves and has a first grating period, and the second grating includes a plurality of second grooves and has a second grating period.
Claim: 2. The diffraction grating structure as claimed in claim 1, wherein the first grating period is equal to the second grating period.
Claim: 3. The diffraction grating structure as claimed in claim 2, wherein the first grooves are misaligned with the second grooves.
Claim: 4. The diffraction grating structure as claimed in claim 2, wherein the first grooves are aligned with the second grooves.
Claim: 5. The diffraction grating structure as claimed in claim 1, wherein the first grating period is less than the second grating period.
Claim: 6. A method for manufacturing a diffraction grating, the method comprising: providing a substrate having a first surface and a second surface opposite to the first surface; providing a first predetermined function associated with arrangement of the grooves of the first grating and a second predetermined function associated with arrangement of the grooves of the second grating; transforming the first function into a first Fourier series and the second function into a second Fourier series; forming the first grating on the first surface of the substrate using a fast tool sever system according to the first Fourier series; forming the second grating on the second surface using the fast tool sever system according to the second Fourier series.
Claim: 7. The method as claimed in claim 6, wherein a Ni alloy film is formed on the first surface and the second surface of the substrate.
Claim: 8. The method as claimed in claim 6, wherein the fast tool sever system is driven by a piezoelectric ceramic driver to form the first grating and the second grating.
Current U.S. Class: 359/569
Current International Class: 02; 02; 23
Prístupové číslo: edspap.20090116110
Databáza: USPTO Patent Applications
Popis
Abstrakt:A diffraction grating structure comprises a substrate having a first surface and a second surface opposite to the first surface. A first grating is defined on the first surface and a second grating is defined on the second surface. The first grating includes a plurality of first grooves and has a first grating period. The second grating includes a plurality of second grooves and has a second grating period. The first groove and the second groove are formed by a fast tool servo system.