Physics-Based System-level Modeling of Acoustic MEMS Transducers by Generalized Kirchhoffian Networks: a Perspective View
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| Název: | Physics-Based System-level Modeling of Acoustic MEMS Transducers by Generalized Kirchhoffian Networks: a Perspective View |
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| Autoři: | Schrag, G., Bosetti, G. |
| Přispěvatelé: | CIT EE Professur für Mikrosensorik und -aktorik (Prof. Schrag) |
| Informace o vydavateli: | IEEE |
| Rok vydání: | 2024 |
| Sbírka: | Munich University of Technology (TUM): mediaTUM |
| Témata: | info:eu-repo/classification/ddc/620, Ingenieurwissenschaften, system-level modeling, multi-physics modeling, acoustic transducers, airborne ultrasound transducers, automatic optimization, Visual Perspective, Physics-based Models, Acoustic Transducer, System-level Model, Design Parameters, Level Of Abstraction, Examples Of Systems, Flexible Method, Exemplary Application, Actuator, Damping, Frequency Response, Counter Electrode, Numerical Algorithm, Higher Level of Abstraction, Modeling Platform, Lumped Elements, Compact Model, Different Levels Of Abstraction, Energy Domain, Laser Doppler Vibrometer, Modular Way, Coupling Ratio |
| Popis: | Two exemplary applications from the field of acoustic and ultrasonic transducers are used to demonstrate how system models can be derived using a generic thermodynamic framework in a way that they are optimally adapted to the problem in terms of their level of abstraction. The models are formulated as generalized Kirchhoff networks and are physics-based, so that relevant design parameters are accessible at system level. First, the flexibility of the method w.r.t. true to detail modeling is shown for the case of a silicon microphone. Second, the efficiency of the approach is demonstrated by an automated optimization example of a system consisting of an ultrasonic transducer coupled to an acoustic horn. In future perspective, this methodology shows the potential to become the basis for a uniform and comprehensive platform towards microsystem design and optimization that can be modularly and flexibly adapted to new problems and requirements. |
| Druh dokumentu: | conference object |
| Jazyk: | English |
| Relation: | https://mediatum.ub.tum.de/1767382; https://ieeexplore.ieee.org/document/10613058/metrics#metrics |
| DOI: | 10.1109/dtip62575.2024.10613058 |
| Dostupnost: | https://mediatum.ub.tum.de/1767382 https://doi.org/10.1109/dtip62575.2024.10613058 https://ieeexplore.ieee.org/document/10613058/metrics#metrics |
| Rights: | info:eu-repo/semantics/restrictedAccess |
| Přístupové číslo: | edsbas.BD5E5060 |
| Databáze: | BASE |
Nájsť tento článok vo Web of Science | Abstrakt: | Two exemplary applications from the field of acoustic and ultrasonic transducers are used to demonstrate how system models can be derived using a generic thermodynamic framework in a way that they are optimally adapted to the problem in terms of their level of abstraction. The models are formulated as generalized Kirchhoff networks and are physics-based, so that relevant design parameters are accessible at system level. First, the flexibility of the method w.r.t. true to detail modeling is shown for the case of a silicon microphone. Second, the efficiency of the approach is demonstrated by an automated optimization example of a system consisting of an ultrasonic transducer coupled to an acoustic horn. In future perspective, this methodology shows the potential to become the basis for a uniform and comprehensive platform towards microsystem design and optimization that can be modularly and flexibly adapted to new problems and requirements. |
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| DOI: | 10.1109/dtip62575.2024.10613058 |