'Virtual PVD': A Virtual Reality Approach to Explore PVD Magnetron Sputtering
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| Název: | 'Virtual PVD': A Virtual Reality Approach to Explore PVD Magnetron Sputtering |
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| Autoři: | Aurélien Besnard, Ruding Lou |
| Přispěvatelé: | Administrateur Ensam, Compte De Service |
| Zdroj: | Lecture Notes in Computer Science ISBN: 9783031977718 |
| Informace o vydavateli: | Springer Nature Switzerland, 2025. |
| Rok vydání: | 2025 |
| Témata: | Virtual reality (VR), Physical vapor deposition (PVD), [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [INFO.INFO-GR] Computer Science [cs]/Graphics [cs.GR], Numerical simulation, Human-machine interaction (HMI), [PHYS.COND.CM-MS] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] |
| Popis: | The physical Vapor Deposition (PVD) surface treatment process con-sists of numerous steps involving of multi-physical and multiscale phenomena. i These phenomena are beyond the ability of human perception in their entirety which is a scientific challenge for learning PVD. The present article proposes a Virtual Reality (VR) approach dedicated to the PVD process learning and a pro-totype is developed with different modules. The virtual immersion includes two modalities. One ex-situ, in the surface treatment laboratory, at a real scale (1:1), allowing users to explore the process, the machine components, and to experi-ment with technical gestures such as handling the machine door or installing sub-strate-holder rods inside. The second modality is in-situ, enabling the user to fol-low the process steps immersed in an environment inaccessible to humans and multi-scale. These experiments help to understand the physical phenomena oc-curring thro |
| Druh dokumentu: | Part of book or chapter of book Conference object |
| Popis souboru: | application/pdf |
| Jazyk: | English |
| DOI: | 10.1007/978-3-031-97772-5_6 |
| Rights: | Springer Nature TDM |
| Přístupové číslo: | edsair.doi.dedup.....0815afd768733301f53d6f7ae356d7f0 |
| Databáze: | OpenAIRE |
Nájsť tento článok vo Web of Science | Abstrakt: | The physical Vapor Deposition (PVD) surface treatment process con-sists of numerous steps involving of multi-physical and multiscale phenomena. i These phenomena are beyond the ability of human perception in their entirety which is a scientific challenge for learning PVD. The present article proposes a Virtual Reality (VR) approach dedicated to the PVD process learning and a pro-totype is developed with different modules. The virtual immersion includes two modalities. One ex-situ, in the surface treatment laboratory, at a real scale (1:1), allowing users to explore the process, the machine components, and to experi-ment with technical gestures such as handling the machine door or installing sub-strate-holder rods inside. The second modality is in-situ, enabling the user to fol-low the process steps immersed in an environment inaccessible to humans and multi-scale. These experiments help to understand the physical phenomena oc-curring thro |
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| DOI: | 10.1007/978-3-031-97772-5_6 |