Optical Cantilever Using Diffraction Grating and Sampling Moiré Method
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| Title: | Optical Cantilever Using Diffraction Grating and Sampling Moiré Method |
|---|---|
| Authors: | Soya Sato, Toshihiro Shiratori, Tetsuo Kan, Hidetoshi Takahashi |
| Source: | 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS). :979-982 |
| Publisher Information: | IEEE, 2025. |
| Publication Year: | 2025 |
| Document Type: | Article |
| DOI: | 10.1109/mems61431.2025.10917823 |
| Rights: | STM Policy #29 |
| Accession Number: | edsair.doi...........fa075cfc5e4a44b4397368ff1d3b3d37 |
| Database: | OpenAIRE |
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