Cyclic scheduling of multi-type wafers concurrent processing in single-arm cluster tools with residency time constraints
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| Title: | Cyclic scheduling of multi-type wafers concurrent processing in single-arm cluster tools with residency time constraints |
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| Authors: | Xin Li, Wen Yang |
| Source: | Expert Systems with Applications. 269:126443 |
| Publisher Information: | Elsevier BV, 2025. |
| Publication Year: | 2025 |
| Document Type: | Article |
| Language: | English |
| ISSN: | 0957-4174 |
| DOI: | 10.1016/j.eswa.2025.126443 |
| Rights: | Elsevier TDM |
| Accession Number: | edsair.doi...........bb513d8003af072ffbb4b9ab12060940 |
| Database: | OpenAIRE |
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