A simulation and experimental study of a valveless piezoelectric micropump based on the synthetic jet principle.

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Název: A simulation and experimental study of a valveless piezoelectric micropump based on the synthetic jet principle.
Autoři: Lv, Wencheng, Ni, Jiafeng, Xuan, Weipeng, Li, Yixing, Huang, Xiwei, Sun, Lingling, Jin, Hao, Dong, Shurong, Luo, Jikui
Zdroj: Nanotechnology & Precision Engineering; Jun2025, Vol. 8 Issue 2, p1-9, 9p
Témata: MICROPUMPS, PIEZOELECTRIC actuators, ENERGY dissipation, FLOW velocity, EIGENFREQUENCIES, GAS flow, FLUID power technology, FINITE element method
Abstrakt: A stacked piezoelectric micropump based on the synthetic jet principle with a size of 22 × 22 × 5 mm3 is designed and fabricated. Through theoretical and finite element method (FEM) analysis, the conditions for achieving a synthetic jet structure are obtained, and the gas flow properties inside the chamber are analyzed. The first-order mode and resonant frequency of the piezoelectric actuator are simulated. At a resonant frequency of 22.5 kHz, the maximum central displacement of the actuator can reach 12.3 μm. In addition, the key dimensions of the micropump are optimized to improve the output flow rate. Experiments on the prototype of the micropump show that it can reach a maximum output flow rate of 618 mL/min when driven by a sine wave signal of 42 Vpp and 22.5 kHz. The power dissipation does not exceed 600 mW. ARTICLE HIGHLIGHTS: • A piezoelectric valveless micropump based on the synthetic jet principle was developed with an operating frequency of 22.5 kHz (outside of the range of human hearing) to achieve a silent effect. • Extensive theoretical analysis and finite element method (FEM) simulations were conducted to optimize the key structural dimensions for a maximum flow rate, with significant correlation between the experimental and simulated results. • The micropump achieved a maximum output flow rate of 618 mL/min with a compact size of 22 × 22 × 5 mm3 and low power dissipation (<600 mW). [ABSTRACT FROM AUTHOR]
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Abstrakt:A stacked piezoelectric micropump based on the synthetic jet principle with a size of 22 × 22 × 5 mm<sup>3</sup> is designed and fabricated. Through theoretical and finite element method (FEM) analysis, the conditions for achieving a synthetic jet structure are obtained, and the gas flow properties inside the chamber are analyzed. The first-order mode and resonant frequency of the piezoelectric actuator are simulated. At a resonant frequency of 22.5 kHz, the maximum central displacement of the actuator can reach 12.3 μm. In addition, the key dimensions of the micropump are optimized to improve the output flow rate. Experiments on the prototype of the micropump show that it can reach a maximum output flow rate of 618 mL/min when driven by a sine wave signal of 42 V<subscript>pp</subscript> and 22.5 kHz. The power dissipation does not exceed 600 mW. ARTICLE HIGHLIGHTS: • A piezoelectric valveless micropump based on the synthetic jet principle was developed with an operating frequency of 22.5 kHz (outside of the range of human hearing) to achieve a silent effect. • Extensive theoretical analysis and finite element method (FEM) simulations were conducted to optimize the key structural dimensions for a maximum flow rate, with significant correlation between the experimental and simulated results. • The micropump achieved a maximum output flow rate of 618 mL/min with a compact size of 22 × 22 × 5 mm<sup>3</sup> and low power dissipation (<600 mW). [ABSTRACT FROM AUTHOR]
ISSN:16726030
DOI:10.1063/10.0034752