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A study of the formation of fuzzy tungsten in a HiPIMS plasma system.

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Název: A study of the formation of fuzzy tungsten in a HiPIMS plasma system.
Autoři: Ali, Zeyad, Bahri, Mounib, Bilton, Matthew, Bradley, James W
Zdroj: Journal of Physics D: Applied Physics; 4/26/2024, Vol. 57 Issue 17, p1-9, 9p
Témata: HELIUM ions, LANGMUIR probes, ION energy, MAGNETRON sputtering, SURFACE temperature
Abstrakt: Nanostructured 'fuzzy' tungsten has been grown for the first time in a high-power impulse magnetron sputtering high power-impulse magnetron sputtering-(HiPIMS) system. The fuzzy layers were formed over range of surface temperatures T s, from 1025 to 1150 K, for helium ion fluences of 5.02 × 1024 m−2, and mean ion bombardment energy of 55 eV. The time-evolution of the helium ion flux (ΓHe) and incident energy (E He) were determined during the HiPIMS pulse (of width of 150 μ s) using a planar Langmuir probe. The micrographic findings revealed that, the thickness of HiPIMS-grown nano-tendrill layers increased by 83% (from 274 to 501 nm) for only a 125 K rise in T s. This result is explained by the fact that higher surface temperatures led to larger helium bubbles which ultimately produce a thicker nanostructured layer. The growth rate of fuzzy tungsten layers in HiPIMS conditions is approximately 50% lower than those observed for DC magnetron operation. [ABSTRACT FROM AUTHOR]
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Abstrakt:Nanostructured 'fuzzy' tungsten has been grown for the first time in a high-power impulse magnetron sputtering high power-impulse magnetron sputtering-(HiPIMS) system. The fuzzy layers were formed over range of surface temperatures T <subscript>s,</subscript> from 1025 to 1150 K, for helium ion fluences of 5.02 × 10<sup>24</sup> m<sup>−2</sup>, and mean ion bombardment energy of 55 eV. The time-evolution of the helium ion flux (Γ<subscript>He</subscript>) and incident energy (E <subscript>He</subscript>) were determined during the HiPIMS pulse (of width of 150 μ s) using a planar Langmuir probe. The micrographic findings revealed that, the thickness of HiPIMS-grown nano-tendrill layers increased by 83% (from 274 to 501 nm) for only a 125 K rise in T <subscript>s</subscript>. This result is explained by the fact that higher surface temperatures led to larger helium bubbles which ultimately produce a thicker nanostructured layer. The growth rate of fuzzy tungsten layers in HiPIMS conditions is approximately 50% lower than those observed for DC magnetron operation. [ABSTRACT FROM AUTHOR]
ISSN:00223727
DOI:10.1088/1361-6463/ad2005