Podrobná bibliografie
| Název: |
The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications. |
| Autoři: |
Wang, Ye, Fu, Xiuhua, Chen, Yongyi, Qin, Li, Ning, Yongqiang, Wang, Lijun |
| Zdroj: |
Applied Sciences (2076-3417); Jul2022, Vol. 12 Issue 13, pN.PAG-N.PAG, 31p |
| Témata: |
DIFFRACTION gratings, SURFACE structure, OPTICAL dispersion, LASER beams, LITHOGRAPHY |
| Abstrakt: |
The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high diffraction efficiency and high laser-induced damage thresholds, such as metal-film and multilayer-dielectric-film gratings. Then, we review the basic principles and most recent stages in the development of manufacturing techniques, such as mechanical scribing, holographic exposure, electron-beam lithography, and nanoimprinting. [ABSTRACT FROM AUTHOR] |
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