Zobrazit v EDS

Flexible Strain Sensor Based on Ultra-Thin Quartz Plate.

Uloženo v:
Podrobná bibliografie
Název: Flexible Strain Sensor Based on Ultra-Thin Quartz Plate.
Autoři: Feng, Bin, Jin, Hao, Fang, Zijing, Yu, Zhentao, Dong, Shurong, Luo, Jikui
Zdroj: IEEE Sensors Journal; Sep2021, Vol. 21 Issue 17, p18571-18577, 7p
Abstrakt: In the past few years, many types of surface acoustic wave (SAW) strain sensors have been developed using various piezoelectric substrates to improve detectable range and sensitivity. In this paper, we report a SAW flexible strain sensor based on ultra-thin AT-X quartz plate with a thickness of 31 $\mu {\mathrm {m}}$. The sensor has a high sensitivity of $251.9 \mathrm{~Hz} / \mu \varepsilon$ , an excellent linearity for the strain range from 1 to $5000~\mu \varepsilon$ , and which is about 12 times higher than those of other SAW strain sensors based on bulk substrates. The resolution of the sensors is about 3280 Hz in frequency and $14~\mu \varepsilon$ in strain. Moreover, the sensors exhibit a very low temperature coefficient of frequency (TCF) of about −1.06 ppm/°C in the temperature range from 20 to 80°C. Our new sensor paves the way for the fabrication of high-performance strain sensing devices. [ABSTRACT FROM AUTHOR]
Copyright of IEEE Sensors Journal is the property of IEEE and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Databáze: Complementary Index
Popis
Abstrakt:In the past few years, many types of surface acoustic wave (SAW) strain sensors have been developed using various piezoelectric substrates to improve detectable range and sensitivity. In this paper, we report a SAW flexible strain sensor based on ultra-thin AT-X quartz plate with a thickness of 31 $\mu {\mathrm {m}}$. The sensor has a high sensitivity of $251.9 \mathrm{~Hz} / \mu \varepsilon$ , an excellent linearity for the strain range from 1 to $5000~\mu \varepsilon$ , and which is about 12 times higher than those of other SAW strain sensors based on bulk substrates. The resolution of the sensors is about 3280 Hz in frequency and $14~\mu \varepsilon$ in strain. Moreover, the sensors exhibit a very low temperature coefficient of frequency (TCF) of about −1.06 ppm/°C in the temperature range from 20 to 80°C. Our new sensor paves the way for the fabrication of high-performance strain sensing devices. [ABSTRACT FROM AUTHOR]
ISSN:1530437X
DOI:10.1109/JSEN.2021.3088473