Zobrazit v EDS

A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity.

Uloženo v:
Podrobná bibliografie
Název: A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity.
Autoři: Xu, Hongsheng, Jin, Hao, Dong, Shurong, Chen, Jinkai, Song, Xinyu, Xuan, Weipeng, Shi, Lin, Huang, Shuyi, Zhang, Pengjun, Luo, Jikui
Zdroj: AIP Advances; Jan2021, Vol. 11 Issue 1, p1-7, 7p
Témata: TEMPERATURE sensors, ACOUSTIC surface waves, SURFACE acoustic wave sensors
Abstrakt: Langasite (LGS) surface acoustic wave (SAW) temperature sensors have a large second order temperature coefficient of frequency, which leads to their non-linear and non-monotonic responses in a wide temperature range and possibly makes the measured temperatures non-unique for a specific sensor response. Here, we propose a high-temperature Pt/LGS SAW sensor with linear frequency–temperature behavior in a wide temperature range, which was fabricated on a LGS (0°, 138.5°, 72°) substrate. The sensor has a single acoustic mode, but dual resonances with similar second- and third-order temperature sensitivities that were utilized for achieving a linear frequency–temperature response by a method of difference. A linear relationship between the measured sensor output (Δfm21) and temperature was obtained in the range of −60 °C to 700 °C, consistent with the theoretical analysis. The sensor has a high sensitivity of −167 ppm/K for the whole temperature range. All the results demonstrated exciting prospects of the sensor for wide temperature monitoring in harsh environments. [ABSTRACT FROM AUTHOR]
Copyright of AIP Advances is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Databáze: Complementary Index
Popis
Abstrakt:Langasite (LGS) surface acoustic wave (SAW) temperature sensors have a large second order temperature coefficient of frequency, which leads to their non-linear and non-monotonic responses in a wide temperature range and possibly makes the measured temperatures non-unique for a specific sensor response. Here, we propose a high-temperature Pt/LGS SAW sensor with linear frequency–temperature behavior in a wide temperature range, which was fabricated on a LGS (0°, 138.5°, 72°) substrate. The sensor has a single acoustic mode, but dual resonances with similar second- and third-order temperature sensitivities that were utilized for achieving a linear frequency–temperature response by a method of difference. A linear relationship between the measured sensor output (Δf<subscript>m21</subscript>) and temperature was obtained in the range of −60 °C to 700 °C, consistent with the theoretical analysis. The sensor has a high sensitivity of −167 ppm/K for the whole temperature range. All the results demonstrated exciting prospects of the sensor for wide temperature monitoring in harsh environments. [ABSTRACT FROM AUTHOR]
ISSN:21583226
DOI:10.1063/5.0036554