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SiO2 broadband antireflection coatings produced via magnetron sputtering.

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Title: SiO2 broadband antireflection coatings produced via magnetron sputtering.
Authors: Xu, Yanfei1 (AUTHOR), Zhu, Ke1 (AUTHOR) xuezhouzk@163.com
Source: Ceramics International. Nov2025:Part C, Vol. 51 Issue 27, p55284-55291. 8p.
Subject Terms: *ANTIREFLECTIVE coatings, *MAGNETRON sputtering, *DURABILITY, *SURFACE coatings, *TRANSMITTANCE (Physics), *SILICA
Abstract: Broadband antireflection (AR) coatings are crucial for enhancing optical efficiency; however, the simultaneous achievement of high transmittance and robust mechanical durability remains a significant challenge. This study presents a novel fabrication strategy involving reactive magnetron co-sputtering of Si and Al-doped ZnO (AZO, 2 wt% Al 2 O 3) targets, followed by selective etching in dilute hydrochloric acid (4 vol% HCl), to produce porous SiO 2 coatings with optimized optical and mechanical properties. The effects of AZO sputtering power and working pressure on the coatings' properties were systematically investigated. Comprehensive characterization confirms that the sacrificial ZnO phase is completely removed, resulting in a porous SiO 2 network that significantly enhances transmittance. The optimal coating (SZ-20), prepared under an AZO sputtering power of 20 W and a working pressure of 4 Pa, demonstrates excellent broadband AR performance, with average transmittances of 94.5 % (400–800 nm), 94.0 % (400–1100 nm), and 93.5 % (400–2000 nm). Furthermore, the optimized coating exhibits hydrophilicity (water contact angle of 13°) and high mechanical robustness (pencil hardness of 5H). This strategy thus provides an industrially viable and scalable pathway for fabricating robust, high-performance broadband AR coatings, demonstrating great potential for application in optical devices. [ABSTRACT FROM AUTHOR]
Database: Academic Search Index
Description
Abstract:Broadband antireflection (AR) coatings are crucial for enhancing optical efficiency; however, the simultaneous achievement of high transmittance and robust mechanical durability remains a significant challenge. This study presents a novel fabrication strategy involving reactive magnetron co-sputtering of Si and Al-doped ZnO (AZO, 2 wt% Al 2 O 3) targets, followed by selective etching in dilute hydrochloric acid (4 vol% HCl), to produce porous SiO 2 coatings with optimized optical and mechanical properties. The effects of AZO sputtering power and working pressure on the coatings' properties were systematically investigated. Comprehensive characterization confirms that the sacrificial ZnO phase is completely removed, resulting in a porous SiO 2 network that significantly enhances transmittance. The optimal coating (SZ-20), prepared under an AZO sputtering power of 20 W and a working pressure of 4 Pa, demonstrates excellent broadband AR performance, with average transmittances of 94.5 % (400–800 nm), 94.0 % (400–1100 nm), and 93.5 % (400–2000 nm). Furthermore, the optimized coating exhibits hydrophilicity (water contact angle of 13°) and high mechanical robustness (pencil hardness of 5H). This strategy thus provides an industrially viable and scalable pathway for fabricating robust, high-performance broadband AR coatings, demonstrating great potential for application in optical devices. [ABSTRACT FROM AUTHOR]
ISSN:02728842
DOI:10.1016/j.ceramint.2025.09.250