Simulation of light-illuminated STM measurements

A three dimensional simulation system for light-illuminated STM measurements is proposed for the first time combining semiconductor process and device simulators with an FDTD solver. Photo-generation rates estimated from light intensity obtained from the FDTD solver are incorporated into a semicondu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	International Conference on Simulation of Semiconductor Processes and Devices S. 129 - 132
Hauptverfasser:	Fukuda, Koichi, Nishizawa, Masayasu, Tada, Tetsuya, Bolotov, Leonid, Suzuki, Kaina, Sato, Shigeo, Arimoto, Hiroshi, Kanayama, Toshihiko
Format:	Tagungsbericht
Sprache:	Englisch Japanisch
Veröffentlicht:	IEEE 01.09.2014
Schlagworte:	Current measurement Finite difference methods finite-difference time-domain FDTD light-illuminated STM Probes scanning tunneling microscopy STM Semiconductor device measurement semiconductor device simulation Semiconductor process modeling Time-domain analysis Tunneling tunneling currents
ISBN:	1479952877, 9781479952878
ISSN:	1946-1569
Online-Zugang:	Volltext
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